Integrated gas panel apparatus

ABSTRACT

Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body comprises at least a main flow channel block body for forming a main flow channel, and a branch flow channel block body for forming a branch flow channel. The branch flow channel block bodies are arranged on the both right and left sides to face each other by having the main flow channel block body at the center.

FIELD OF THE ART

This invention relates to an integrated gas panel apparatus used for aprocess of manufacturing semiconductors.

BACKGROUND ART

Integrated gas panel apparatus is to control and finally to mix flow ofseveral different kinds of gas used for manufacturing semiconductordevices and to supply them to a chamber. The integrated gas panelapparatus has been developed in order to shorten a gas supply controlline comprising a piping structure arranged on the downstream side ofthe chamber. More concretely, as one example is shown in the patentdocument 1, a gas control unit such as a valve or a mass flow controlleris mounted on a panel body generally of a plate shape. Inside the panelbody are formed, for example, multiple branch flow channels on which theabove-mentioned gas control unit is mounted and a single main flowchannel with which the branch flow channels are connected and into whicheach gas flowing in the branch flow channels joins.

Various improvements have been carried out to the integrated gas panelapparatus, there is an integrated gas panel apparatus having anarrangement of the panel bodies by appropriately connecting variouskinds of block bodies so as to construct a flexible flow channel to copewith various kinds of gas to be used.

-   Patent document 1: Japan patent laid-open number 10-169881

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention

However, for this kind of conventional apparatus, branch flow channelsare arranged in parallel at one side of a main flow channel and portionswhere each of the branch flow channels joins the main flow channel arearranged generally at even intervals from an upstream to a downstream ofthe main flow channel in an order corresponding to an order of thebranch flow channels.

However, with this arrangement, if, for example, the number of thebranch flow channels becomes multiple, a length of the main flow channelbecomes long for the number of the branch flow channels so that the timerequired for the gas to reach the final exit becomes long. Then anadverse effect is exerted on the responsiveness of the fluid circuitsystem. The adverse effect is especially remarkable for the gas from thebranch flow channel located at an upper side of the main flow channel orfor the gas of a small amount. As a result of this, it becomes difficultto fully handle a process that requires short time/high speedresponsiveness. In addition, there will be a problem in that the gasconcentration becomes unstable because of slow responsiveness.

Especially in a semiconductor manufacturing process, since shortening aprocess time of a high speed gas process in a manufacturing process(such as shortening an exhaust time until rising isstabilized/shortening a purge time at a time of completion) is animportant factor, a problem because of deterioration of theresponsiveness is not preferable.

In addition, for example, in a semiconductor manufacturing process, thefinally supplied several kinds of gas are required to be sufficientlymixed. This is because if a mixed state of the supplied gas is uneven,the quality of a device will be deteriorated. On the contrary,conventionally a length of the pipe located on the downstream side ofthe integrated gas panel apparatus is elongated to promote mixing or agas mixer is arranged on the downstream side of the integrated gas panelapparatus.

However, with this arrangement, although mixture of the gas can beconducted sufficiently, a pipe capacity increases so that an adverseeffect is exerted on the responsiveness. As a result of this, it becomesdifficult to fully cope with a process that requires short time/highspeed responsiveness like the above mentioned example. In addition, ifthe responsiveness is retarded, an adverse effect is exerted onstabilizing the gas concentration at a time of rising. Furthermore, incase that an amount of a gas flow from a branch flow channel is small,the arrival time for the gas becomes longer so that the responsivenessgets worse, and an amount of the joined flow gas is easily fluctuateddue to pressure fluctuation of the gas flowing from the main flowchannel so that it might be a case that the gas concentration finallybecomes unstable.

In addition, since this kind of conventional apparatus has anarrangement wherein the branch flow channels are arranged in parallel atone side of the main flow channel and portions where each of the branchflow channels and the main flow channel join are arranged generally ateven intervals from an upstream to a downstream of the main flow channelin an order corresponding to an order of the branch flow channels, thereis a problem in that the arrival time of the gas to the final exitvaries depending on a location of a portion where the branch flowchannel joins the main flow channel. In this case, since the arrivaltime of the gas flowing from the branch flow channel located at the mostupstream side becomes the longest, this arrival time limits a rate ofthe responsiveness of the fluid circuit system.

Furthermore, since it is not possible to assure the synchronism of thegas arrival time from each branch flow channel, the gas concentrationdistribution tends to be unstable at a time of rising.

In addition, if the number of the branch flow channels becomes multiple,a length of the main flow channel becomes long by just the number of thebranch flow channels so that an adverse effect is exerted on theresponsiveness of the fluid circuit system.

In other words, with a conventional arrangement, it becomes difficult tofully cope with a process that requires short time/high speedresponsiveness and there will be a problem in that the gas concentrationbecomes unstable.

The present claimed invention intends to solve all of these problems anda main object of this invention is to provide an integrated gas panelapparatus which has excellent responsiveness, stabilizes the gasconcentration, and furthermore, can keep a conventional panel shape asit is without complicating or enlarging the structure, or even moreenables downsizing.

Means to Solve the Problems

More specifically, integrated gas panel apparatus in accordance withclaim 1 of the invention comprises multiple branch flow channels in acourse of which a gas control unit such as a valve or a mass flowcontroller is arranged so as to control the gas that flows inside thebranch flow channel, a single main flow channel into which the gas fromeach of the branch flow channels flows and joins, and a panel body of amanifold type inside of which the branch flow channels and the main flowchannel are formed by assembling multiple block bodies, and ischaracterized by that the panel body comprises a main flow channel blockbody that forms the main flow channel, and branch flow channel blockbodies that are arranged to face each other by having the main flowchannel block body at the center and that forms the branch flowchannels.

In accordance with this arrangement, since the branch flow channel thatis conventionally arranged at only one side of the main flow channel isarranged at the right and left sides of the main flow channel, a lengthof the main flow channel can be shortened. As a result, the timerequired for the gas to reach the final exit can be shortened and theresponsiveness can be improved. This also contributes to stabilizationof the gas concentration. In addition, since the panel body is made tohave the same shape as that of a conventional panel body by arrangingthe block bodies constituting each flow channel in a plane, it ispossible to be easily replaced with a conventional panel body.

As the most preferable arrangement to shorten the length of the mainflow channel represented is that a junction where one branch flowchannel joins the main flow channel and another junction where the otherbranch flow channel that faces to the above-mentioned branch flowchannel across the main flow channel joins the main flow channel are setat generally the same position in an elongating direction of the mainflow channel. “Generally the same position in an elongating direction ofthe main flow channel” includes mutually facing sidewall portions of themain flow channel and orthogonal sidewall portions of the main flowchannel in addition to completely conforming the position.

In order to further improve the stabilization of the gas concentrationit is preferable that an insertion bore that is in communication withthe main flow channel is formed in the main flow channel block body, aprojecting pipe that projects its branch flow channel outside isarranged on the branch flow channel block body inside of which an exitportion of the branch flow channel is provided, and a distal end of theprojecting pipe further projects inward from an inside surface of themain flow channel in a state wherein the main flow channel block bodyand the branch flow channel block body are assembled by inserting theprojecting pipe into the insertion bore.

In addition, the integrated gas panel apparatus in accordance with claim5 of the invention of comprises multiple branch flow channels in acourse of which a gas control unit such as a valve or a mass flowcontroller is arranged so as to control the gas that flows inside thebranch flow channel, a main flow channel into which the gas from each ofthe branch flow channels flows, and a panel body inside of which thebranch flow channels and the main flow channel are formed by assemblingmultiple block bodies, and is characterized by that an insertion borethat is in communication with the main flow channel is formed in a mainflow channel block body inside of which the main flow channel isarranged, and a projecting pipe that projects its branch flow channeloutside is arranged on the branch flow channel block body inside ofwhich an exit portion of the branch flow channel is provided, a distalend of the projecting pipe further projects inward from an insidesurface of the main flow channel in a state wherein the main flowchannel block body and the branch flow channel block body are assembledby inserting the projecting pipe into the insertion bore.

In accordance with this arrangement, since the projecting pipe as beingan exit of the branch flow channel projects inside the main flow channelat the connecting portion between the branch flow channel and the mainflow channel so as to narrow a diameter of the main flow channel, thegas inside the branch flow channel is strongly sucked down into the mainflow channel due to a choke effect and the sucked gas is diffused in themain flow channel by a turbulent flow generated rearward of theprojecting pipe. Then mixing of the gas flowing in the main flow channelwith the gas flowing in each branch flow channel is further morepromoted.

As a result, it is possible to mix the gas inside the gas panelapparatus more fully compared with a conventional apparatus. It is alsopossible to dramatically improve the responsiveness compared with aconventional apparatus by shortening a length of the pipe or decreasinga capacity of the gas mixer to be arranged on the downstream side of thegas panel apparatus or by omitting the gas mixer. In addition, with thisarrangement, it is possible to improve the stability of the gasconcentration at a time of rising.

In addition, even though the gas inside the branch flow channel is in asmall amount, the gas can be sucked down into the main flow channelwithout fail. As a result, the gas flow is not likely to fluctuate at atime when a small amount of the gas flowing from the branch flow channeljoins the gas in the main flow channel, and this also contributes tostabilization of the gas concentration.

Furthermore, since the branch flow channel can be joined with the mainflow channel with an arrangement of just projecting the projecting pipefrom the branch flow channel block body by a predetermined length, thestructure is hardly complicated at all. In addition, since theprojecting pipe is concealed inside in an assembled state, a surfaceconfiguration of the connecting portion can be compatible with aconventional one.

In order to promote mixing the gas easily, it is preferable that thedistal end of the projecting pipe is set to reach near a center of themain flow channel in a cross section.

In addition, tridimensional integrated gas panel apparatus in accordancewith claim 8 of the invention comprises multiple branch flow channels ina course of which a gas control unit such as a valve or a mass flowcontroller is arranged so as to control the gas that flows inside thebranch flow channel, a single main flow channel into which the gas fromeach of the branch flow channels flows and joins, a branch flow channelblock body in a shape of a lengthy panel whose bottom surface is set asa mounting surface and inside of which one branch flow channel isformed, and a center block body that holds the multiple branch flowchannel block bodies so that each longitudinal direction of the multiplebranch flow channel block bodies is in parallel mutually with holdingsurfaces formed on side peripheral surfaces, and is characterized bythat the main flow channel is formed on the center block body and middleflow channels are formed to extend from each junction set on the mainflow channel in a direction toward each of the branch flow channels ofthe branch flow channel block body each of which is mounted on the sideperipheral surface of the center block body.

In accordance with this arrangement, since the branch flow channel blockbodies that were conventionally arranged in a plane are arrangedthree-dimensionally, it is possible to downsize the apparatus and toshorten the length of the flow channel. As a result, the responsivenesscan be improved. In addition, since the tridimensional integrated gaspanel apparatus has a tridimensional structure, a degree-of-freedom inarranging each flow channel is increased. Then it is possible to improvethe synchronism of the joining timing of each gas, and eventually toimprove the stabilization of the gas concentration by devising thelength of each flow channel and the junction.

More concretely, in order to improve the responsiveness by shortening alength of the main flow channel, it is preferable that the junction isset at one portion of the main flow channel. Especially, since theoutlet port is ordinarily mounted on an end surface of the center blockbody, if the junction is set at, for example, an end portion of thecenter block body, the length of the main flow channel can be shortened,thereby improving the responsiveness as much as possible.

In order to improve the synchronism of the joining timing of each gas,it is preferable that a rotational symmetrical shape with a center on anaxial line of a center block body is formed by each of the holdingsurfaces, and the junction is arranged on the axial line and each lengthof the middle flow channels is set to be equal.

In this case, if the main flow channel is arranged in the axial line,the length of the main flow channel can be shortened as much aspossible.

In order to further improve the synchronism of the joining timing ofeach gas, a diameter of the middle flow channels or a diameter of thebranch flow channels arranged on the downstream side of, especially amass flow controller may be set in accordance with the flow of each gas(the less the flow is, the smaller the internal diameter is).

As a concrete embodiment with considering facility of manufacturing thetridimensional integrated gas panel apparatus, it is preferable that thecenter block body is in a regular polygonal column shape.

The tridimensional integrated gas panel apparatus that is used for asemiconductor manufacturing process can be represented as a concreteembodiment wherein the effect of this invention is especially remarkableand its usefulness is produced.

Effect of the Invention

With the invention in accordance with claim 1, since the length of themain flow channel can be shortened, it is possible to improve theresponsiveness or the stabilization of the gas concentration at a timeof rising. In addition, since the integrated gas panel apparatus is madeto have the same shape as that of a conventional apparatus, it ispossible to be easily replaced with a conventional panel body.

With the invention in accordance with claim 5, since mixing of the gasflowing in the main flow channel with the gas flowing in the branch flowchannels is further more promoted, it is possible to improve theresponsiveness compared with a conventional apparatus by shortening alength of the pipe or decreasing a capacity of the gas mixer to bearranged on the downstream side of the integrated gas panel apparatus orby omitting the gas mixer, and eventually to improve the stability ofthe gas concentration at a time of rising. Furthermore, since the branchflow channel can be joined with the main flow channel with anarrangement of just projecting the projecting pipe from the branch flowchannel block body by a predetermined length, the structure is hardlycomplicated at all. In addition, since the projecting pipe is concealedinside in an assembled state, a surface configuration of the connectingportion can be compatible with a conventional one.

With the invention in accordance with claim 8, since the branch flowchannel block bodies are arranged three-dimensionally, it is possible todownsize the apparatus and to improve a degree-of-freedom. As a result,it is also possible to improve the responsiveness and the stabilizationof the gas concentration.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an overall perspective view of integrated gas panel apparatusin accordance with a first embodiment of the present claimed invention.

FIG. 2 is a fluid circuit diagram of the integrated gas panel apparatusof this embodiment.

FIG. 3 is a pattern diagram showing a connecting portion in thisembodiment viewed from a direction of a plane surface.

FIG. 4 is a pattern diagram showing a connecting portion of integratedgas panel apparatus of a modified embodiment of this embodiment viewedfrom a direction of a plane surface.

FIG. 5 is a longitudinal sectional view of a principal part showing amain flow channel of the integrated gas panel apparatus of this modifiedembodiment.

FIG. 6 is an overall perspective view of integrated gas panel apparatusin accordance with a second embodiment of the present claimed invention.

FIG. 7 is a fluid circuit diagram of the integrated gas panel apparatusof this embodiment.

FIG. 8 is a partial sectional view of a principal part of the integratedgas panel apparatus of this embodiment.

FIG. 9 is an exploded perspective view showing a connecting portion inthis embodiment.

FIG. 10 is a partial sectional view of a principal part of theintegrated gas panel apparatus of this embodiment.

FIG. 11 is a partially broken overall perspective view showing inside oftridimensional integrated gas panel apparatus in accordance with a thirdembodiment of the present claimed invention.

FIG. 12 is a fluid circuit diagram of the tridimensional integrated gaspanel apparatus in this embodiment.

FIG. 13 is a pattern cross-sectional view showing a junction in thisembodiment.

FIG. 14 is a pattern cross-sectional view of a center block body inaccordance with a modified form of this embodiment.

BEST MODES OF EMBODYING THE INVENTION

Several embodiments of the present claimed invention will be explainedwith reference to drawings. In each of the embodiments, each of thecorresponding components are denoted by the same reference codes,however, there is also a reverse case that a different reference code isdenoted to the component having the same function and a different shape.

First Embodiment 1

The first embodiment refers to FIG. 1 through FIG. 5.

Integrated gas panel apparatus 1 in accordance with this embodimentconfigures a part of a semiconductor manufacturing system. As itsoverall view is shown in FIG. 1, the integrated gas panel apparatus 1 isto introduce various kinds of gas for film forming respectively from gassupply sources, not shown in drawings, to mix the gas and to supply themixed gas to a chamber (not shown in drawings) for semiconductor.

First, with regard to the integrated gas panel apparatus 1, a structureof its fluid circuit including its peripheral circuitry will beexplained with reference to FIG. 2.

The integrated gas panel apparatus 1 has multiple branch flow channelsR1 arranged in parallel in a circuit and a single main flow channel R2to which an exit of each branch flow channel R1 is connected.

An inlet port PI is connected to a proximal end of each branch flowchannel R1 and several kinds of gas is sent to each branch flow channelR1 from the gas supply sources respectively through an outside pipe (notshown in drawings) connected to the inlet port PI. A gas control unitsuch as a valve V or a mass flow controller MFC is arranged in thecourse of each branch flow channel R1 so as to control a gas flowflowing in each branch flow channel R1 or to control a switch to purgegas respectively.

Meanwhile, as mentioned above, the main flow channel R2 has a singleflow channel structure, and connecting portions CN where theabove-mentioned branch flow channels R1 are connected with the main flowchannel R2 are not focused in one place and are arranged at intervalsalong its gas flow. In this embodiment, a gas mixer MIX to stir and mixthe joined gas is arranged on the downstream side of the integrated gaspanel apparatus 1, namely on the downstream side of the main flowchannel R2, and a flow ratio controller FRC to divide the gas mixed bythe gas mixer MIX at a predetermined flow ratio and to output thedivided gas to each chamber from outlet ports PO is arranged on furtherdownstream side of the gas mixer MIX. The gas mixer MIX, the flow ratiocontroller FRC and the outlet ports PO are not drawn in FIG. 1.

With this arrangement, the gas supplied from each gas supply source isflow-controlled in the branch flow channel R1 of the integrated gaspanel apparatus 1 and introduced into the main flow channel R2, thenfully mixed by the gas mixer MIX, and output at a predetermined flowratio through the flow ratio controller FRC from each of the outletports PO respectively.

In FIG. 2, the above-mentioned flow channel for the purge gas, its inletport PX, and its outlet port PY are drawn in addition to the main flowchannel R2 and the branch flow channels R1. The component denoted by thereference code MFM is a verifier to verify whether the flow shown by themass flow controller MFC is accurate or not.

Next, a mechanical structure of the integrated gas panel apparatus 1will be explained with reference to FIG. 1.

The integrated gas panel apparatus 1 comprises a panel body 2 in agenerally plate shape inside of which the main flow channel R2 and thebranch flow channels R1 are formed, the above-mentioned gas control unitV, MFC and ancillary piping structures such as inlet ports PI.

The panel body 2 is, as shown in FIG. 1, in a plate shape formed byconnecting multiple block bodies in a flat. There are several kinds ofblock bodies. In this embodiment at least branch flow channel blockbodies 31 constituting the branch flow channels R1 and a main flowchannel block body 32 constituting the main flow channel R2 are used.

Each of the branch flow channel block bodies 31 is in a flat squareplane shape and some of the branch block bodies 31 have differentinternal piping structures such as for loading a valve or for loading amass flow controller. One branch flow channel R1 is formed by arrangingmultiple branch flow channel block bodies 31 serially so as to be in ashape of a long sheet, and multiple columns (hereinafter also referredto as a branch flow channel block body column 5) of thus seriallyarranged branch flow block bodies 31 are arranged in a horizontal row soas to be in a plate shape. Then multiple branch flow channels R1 arearranged serially as mentioned in the circuit structure.

The main flow channel block body 32 is, for example, in a shape of asingle long plate, inside of which the main flow channel R2 extendsalong a longitudinal direction (an elongating direction). The main flowchannel block body 32 is laminated and connected in a vertical direction(in a direction perpendicular to the plane surface direction of thepanel body 2) of a lower surface of the branch flow channel block body31. The elongating direction of the main flow channel block body 32 isperpendicular to the elongating direction of the branch flow channelblock body column 5.

In this embodiment, multiple (for example, four for each side) branchflow channel block body columns 5 are arranged bilaterally symmetricallywith the center on the main flow channel block body 32. With thisarrangement, as its pattern diagram viewed from the direction of theplane surface is shown in FIG. 3, the branch flow channels R1 arearranged symmetrically at both sides of the main flow channel R2 withthe center on the main flow channel R2.

In addition, the connecting portion CN (hereinafter also referred to asa junction) where one branch flow channel R1 joins the main flow channelR2 and another connecting portion CN where the other branch flow channelR1 that faces to the above-mentioned branch flow channel R1 across themain flow channel R2 joins the main flow channel R2 are set both atgenerally the same position in an elongating direction of the main flowchannel R2 and at both side positions facing each other of the main flowchannel R2. One connecting portion CN may be located at a bottom part ofa main flow channel and the other connecting portion CN may be locatedat a side part of the main flow channel as long as each of theconnecting portions CN is located at the same position in the elongatingdirection of the main flow channel R2 if there is a designingrestriction in arranging components.

In accordance with the gas panel apparatus 1 having the above-mentionedarrangement, since the branch flow channel R1 that is conventionallyarranged at only one side of the main flow channel R2 is arranged at theright and left sides of the main flow channel R2, a length of an areawhere each of the junctions CN are arranged in the main flow channel canbe shortened by half compared with a conventional arrangement. As aresult, since the time required for the gas to reach the final exit canbe shortened, it is possible to improve the responsiveness and also toimprove stabilization of the gas concentration at a time of rising orthe like.

In addition, since the panel body 2 is made to have the same shape asthat of a conventional panel body by arranging the block bodies in aplane, the panel body 2 can be easily replaced with, for example, anexisting panel body.

Next, a modified embodiment of this invention will be explained (in thefollowing modified embodiment, the components corresponding to those ofthe above-mentioned embodiment are denoted by the same reference codes).

For example, as its pattern diagram is shown in FIG. 4, the right andleft branch flow channels R1 may be connected to the main flow channelR2 zigzag. In accordance with this arrangement, since a junction CNwhere one branch flow channel joins the main flow channel and anotherjunction CN where the other branch flow channel that faces to theabove-mentioned branch flow channel across the main flow channel joinsthe main flow channel R2 are set at different positions in an elongatingdirection of the main flow channel, a length of the main flow channel R2becomes a little longer compared with a case of the above-mentionedembodiment. However, since it is still possible to shorten a length ofthe main flow channel R2 dramatically compared with a case that branchflow channels are arranged at only one side of the main flow channellike a conventional arrangement so that almost the same effect andoperation can be produced as that of the above-mentioned embodiment.

Furthermore, in accordance with this embodiment, exit pipes 311 of thebranch flow channels R1 can be easily arranged to project at thejunction CN in the main flow channel R2 by a predetermined lengthwithout causing mutual interference.

Next, one example of the arrangement of the junction CN will bedetailed.

In this example, as shown in FIG. 5, an insertion bore 321 is arrangedto open on a surface of the main flow channel block body 32, theinsertion bore 321 is arranged to be in communication with the main flowchannel R2 located inside of the main flow channel block body 32, and acylindrical exit pipe (hereinafter also referred to as a projectingpipe) 311 projecting from the surface of the branch flow channel blockbody 31 located at the most downstream side, namely, the branch flowchannel block body 31(1) having an exit part of the branch flow channelR1 is integrally (may be separately) arranged on the branch flow channelblock body 31.

Then the projecting pipe 311 is inserted into the insertion bore 321 anda distal end of the projecting pipe 311 further projects inward from aninside surface R2 a (shown in FIG. 5) of the main flow channel R2 in astate wherein the main flow channel block body 32 and the branch flowchannel block body 31(1) are assembled. A length of the projecting partis so set that, for example, the distal end of the projecting pipe 311reaches near a center of the main flow channel R2 in a cross section.

In addition, in this assembled state, a seal member 6 such as an O-ringis arranged between a plain surface of the main flow channel block body32 and a plain surface of the branch flow channel block body 31(1) thatfaces the main flow channel block body 32 so as to tightly attach themain flow channel block body 32 and the branch flow channel block body31(1) in a thrust direction. The seal member 6 prevents gas leakage atthe connecting portion CN.

In accordance with this arrangement, since the projecting pipe 311 asbeing an exit of the branch flow channel R1 projects inside the mainflow channel R2 at the connecting portion CN between the branch flowchannel R1 and the main flow channel R2 so as to narrow a diameter ofthe main flow channel R2, the gas flow rate of the main flow channel R2at the connecting portion CN quickens and the pressure drops so that thegas inside the branch flow channel R1 is strongly sucked down into themain flow channel R2. Since the sucked gas is diffused in the main flowchannel R2 by a turbulent flow generated rearward of the projecting pipe311, the gas can be mixed into the gas flowing in the main flow channelR2 further more uniformly. In other words, it is possible to mix the gasinside the panel body 2 more fully in advance compared to a conventionalarrangement.

As a result, it is possible to shorten a length of the pipe located onthe downstream side of the connecting portion that used to be set longfor the conventional arrangement in order to fully mix the gas, and alsoto downsize the capacity of the gas mixer MIX or to omit the gas mixerMIX. In addition, it is possible to further improve the responsivenessof the fluid circuit system by just an amount that the flow channelcapacity is downsized.

In other words, if this arrangement is applied to the above-mentionedembodiment, it is possible both to shorten the length of the main flowchannel R2 where the junctions CN are arranged and to shorten the lengthof the flow channel located on the downstream side of the junction CN.As a result, it is possible to dramatically promote improvement of theresponsiveness and the stability of the gas concentration at a time ofrising due to the improved responsiveness.

In addition, even though the gas flow in the branch flow channel R1 issmall, since it is possible to suck down the gas into the main flowchannel R2 without fail as mentioned above, also in view of this it ispossible to further improve the final stability of the mixed gasconcentration.

In addition, since a point of the structure of this embodiment that issignificantly different from the conventional structure is only that thebranch flow channel block bodies 31 are arranged to face each other andthat the projecting pipe 311 projects from the branch flow channel blockbody 31 by a predetermined length, the structure is hardly complicatedat all. Furthermore, since the projecting pipe 311 is concealed insidein an assembled state, a surface configuration of the connecting portioncan be compatible with a conventional one.

As another modified embodiment, for example, an internal diameter ofeach branch flow channel may be set in accordance with the flow of eachgas (the less the flow is, the smaller the internal diameter is). Withthis arrangement, since the flow rate of each gas becomes equal andsynchronism of the joining timing of each gas in the main flow channelis improved compared with the conventional arrangement, it is possibleto supply the mixed gas in a shorter period of time without beingaffected by the gas flow.

The block body is not limited to a square shape, but may be, forexample, a circular plate shape. However, it is preferable to have aflat part at a position facing each other in order to facilitate thethrust seal structure.

Second Embodiment

A second embodiment of this invention will be explained with referenceto FIG. 6 through FIG. 10.

The integrated gas panel apparatus 1 in accordance with this embodimentconfigures a part of a semiconductor manufacturing system. As itsoverall view is shown in FIG. 6, the integrated gas panel apparatus 1 isto introduce various kinds of gas for film forming respectively from gassupply sources, not shown in drawings, to mix the gas and to supply themixed gas to a chamber (not shown in drawings) for semiconductor.

First, with regard to the integrated gas panel apparatus 1, a structureof its fluid circuit including its peripheral circuitry will beexplained with reference to FIG. 7.

The integrated gas panel apparatus 1 has multiple branch flow channelsR1 arranged in parallel and a single main flow channel R2 to which anexit of each branch flow channel R1 is connected.

An inlet port PI is connected to a proximal end of each branch flowchannel R1 and several kinds of gas are sent to each branch flow channelR1 from the gas supply sources (not shown in drawings) respectivelythrough an outside pipe (not shown in drawings) connected to the inletport PI. A gas control unit such as a valve V or a mass flow controllerMFC is arranged in the course of each branch flow channel R1 so as tocontrol a gas flow flowing in each branch flow channel R1 or to controla switch to purge gas respectively.

Meanwhile, as mentioned above, the main flow channel R2 has a singleflow channel structure, and connecting portions CN where theabove-mentioned branch flow channels R1 are connected with the main flowchannel R2 are not focused in one place and are arranged at intervalsalong its gas flow. In this embodiment, a gas mixer MIX to stir and mixthe joined gas is arranged on the downstream side of the integrated gaspanel apparatus 1, namely on the downstream side of the main flowchannel R2, and a flow ratio controller FRC to divide the gas mixed bythe gas mixer MIX at a predetermined flow ratio and to output thedivided gas to each chamber from outlet ports PO is arranged on furtherdownstream side of the gas mixer MIX. The gas mixer MIX, the flow ratiocontroller FRC and the outlet ports PO are not drawn in FIG. 6.

With this arrangement, the gas supplied from each gas supply source isflow-controlled in the branch flow channel R1 of the integrated gaspanel apparatus 1 and introduced into the main flow channel R2, thenfully mixed by the gas mixer MIX, and output at a predetermined flowratio through the flow ratio controller FRC from each of the outletports PO respectively.

In FIG. 7, the flow channel for the purge gas, its inlet port PX, andits outlet port PY are drawn in addition to the main flow channel R2 andthe branch flow channels R1. The component denoted by the reference codeMFM is a verifier to verify whether the flow shown by the mass flowcontroller MFC is accurate or not.

Next, a mechanical structure of the integrated gas panel apparatus 1will be explained with reference to FIG. 6.

The integrated gas panel apparatus 1 comprises a panel body 2 in agenerally plate shape inside of which the main flow channel R2 and thebranch flow channels R1 are formed, the above-mentioned gas control unitand ancillary pipes such as inlet ports PI.

The panel body 2 is, as shown in FIG. 6, in a plate shape formed byconnecting multiple block bodies in a flat. There are several kinds ofthe block bodies. In this embodiment at least a branch flow channelblock bodies 31 constituting the branch flow channels R1 and a main flowchannel block body 32 constituting the main flow channel R2 are used.

Each of the branch flow channel block bodies 31 is in a flat squareplane shape and some of the branch block bodies 31 have differentinternal piping structures such as for loading a valve or for loading amass flow controller. One branch flow channel R1 is formed by arrangingmultiple branch flow channel block bodies 31 serially so as to be in ashape of a long sheet, and multiple columns (hereinafter also referredto as a branch flow channel block body column 5) of thus seriallyarranged branch flow block bodies 31 are arranged in a horizontal row soas to be in a plate shape. Then multiple branch flow channels R1 arearranged serially as mentioned in the fluid circuit structure.

The main flow channel block body 32 is, for example, in a shape of asingle long plate, inside of which the main flow channel R2 is arrangedalong its longitudinal direction. The main flow channel block body 32 islaminated and connected in a vertical direction (in a directionperpendicular to the plane surface direction of the panel body 2) of alower surface of the branch flow channel block body 31. The elongatingdirection of the main flow channel block body 32 is perpendicular to theelongating direction of the branch flow channel block body column 5.With this arrangement, the exit of each branch flow channel R1 isconnected to the main flow channel R2.

In this embodiment, the following arrangement is adopted to theconnecting portion CN.

In other words, as shown in FIG. 8 through FIG. 10, an insertion bore321 is arranged to open on an upper surface of the main flow channelblock body 32 and the insertion bore 321 is in communication with themain flow channel R2 formed inside of the main flow channel block body32, and a cylindrical projecting pipe 311 inside of which the branchflow channel is formed to project is integrally formed with a lowersurface of the branch flow channel block body 31 located on the mostdownstream, namely the branch flow channel 31(1) having an exit portionof the branch flow channel R1. An outside diameter of the projectingpipe 311 is set to be generally the same as an inside diameter of theinsertion bore 321.

Then the projecting pipe 311 is inserted into the insertion bore 321 anda distal end of the projecting pipe 311 further projects inward from aninside surface R2 a (shown in FIG. 10) of the main flow channel R2 in astate wherein the main flow channel block body 32 and the branch flowchannel block body 31(1) are assembled. A length of the projecting partis so set that, for example, the distal end of the projecting pipe 311reaches near a center of the main flow channel R2 in a cross section.

In addition, in this assembled state, a seal member 6 such as an O-ringis arranged between a plain surface of the main flow channel block body32 and a plain surface of the branch flow channel block body 31(1) thatfaces the main flow channel block body 32 so as to tightly attach themain flow channel block body 32 and the branch flow channel block body31(1) in a thrust direction. The seal member 6 prevents gas leakage atthe connecting portion CN. The reference code 322 is a counter sunk partthat is arranged on the main flow channel block body 32 and thataccommodates the seal member 6. The counter sunk part 322 may bearranged on the branch flow channel block body 31.

In accordance with this arrangement, since the projecting pipe 311 asbeing an exit of the branch flow channel R1 projects inside the mainflow channel R2 at the connecting portion CN between the branch flowchannel R1 and the main flow channel R2 so as to narrow a diameter ofthe main flow channel R2, the gas flow rate of the main flow channel R2at the connecting portion CN quickens and the pressure drops so that thegas inside the branch flow channel R1 is strongly sucked down into themain flow channel R2. Since the sucked gas is diffused in the main flowchannel R2 by a turbulent flow generated rearward of the projecting pipe311, the gas can be mixed into the gas flowing in the main flow channelR2 further more uniformly. In other words, it is possible to mix the gasinside the panel body 2 more fully in advance compared to a conventionalarrangement and it is possible to downsize the capacity of the gas mixerMIX locating on the downstream side of the connecting portion CN or toomit the gas mixer MIX in some cases. As a result, it is possible todramatically promote improvement of the responsiveness. In addition, itis also possible to improve the stability of the gas concentration at atime of rising due to the improved responsiveness.

Furthermore, even though the gas flow in the branch flow channel R1 issmall, since it is possible to suck down the gas into the main flowchannel R2 without fail, also in view of this it is possible to furtherimprove the final stability of the mixed gas concentration.

In addition, since a point of the structure of this embodiment that issignificantly different from the conventional structure is only that theprojecting pipe 311 projects from the branch flow channel block body 31by a predetermined length, the structure is hardly complicated at all.Furthermore, since the projecting pipe 311 is concealed inside in anassembled state, a surface configuration of the connecting portion canbe compatible with a conventional one.

In addition, since a thrust seal structure wherein the seal member 6 istightly arranged between a surface of the block body 31(1) and a surfacethat faces the former surface of the block body 31(1) is adopted, it ispossible to easily and securely prevent the gas leakage at theconnecting portion CN.

This embodiment may be modified. For example, it is acceptable at leastas long as an outer diameter of the projecting pipe is smaller than aninternal diameter of the main flow channel. The projecting degree of theprojecting pipe in the main flow channel is preferably near a center ofthe main flow channel for this embodiment, however, it may be set at adegree optimal for mixing with considering the gas flow rate.

Furthermore, an internal diameter (more preferably, an internal diameterof the branch flow channel located on the downstream side of the massflow controller) of each projecting pipe may be set in accordance withthe flow of each gas (the less the flow is, the smaller the internaldiameter is). With this arrangement, since it is possible to shorten thearrival time of the gas whose flowing amount is small because the flowrate of the gas of small amount can be made the same as that of theother gas, synchronism of the joining timing of each gas in the mainflow channel is improved compared with the conventional arrangement, itis possible to supply the mixed gas in a shorter period of time withoutbeing affected by the gas flow.

In addition, the projecting pipe is not limited to a cylindrical shape,and may be a polygonal tube or other various shapes.

Furthermore, the projecting pipe is not only integrally arranged withthe branch flow channel block body but also may be separately arrangedfrom the branch flow channel block body and assembled together with thebranch flow channel block body.

The block body is not limited to a square shape, but may be, forexample, a circular plate shape. However, it is preferable to have aflat part at a position facing each other in order to facilitate thethrust seal structure.

Third Embodiment

A third embodiment of this invention will be explained with reference toFIG. 11 through FIG. 14.

Tridimensional integrated gas panel apparatus 1 in accordance with thisembodiment configures a part of a semiconductor manufacturing system. Asits overall view is shown in FIG. 11, the tridimensional integrated gaspanel apparatus 1 is to introduce various kinds of gas for film formingrespectively from gas supply sources, not shown in drawings, to mix thegas and to supply the mixed gas to a chamber (not shown in drawings) forsemiconductor.

First, with regard to the tridimensional integrated gas panel apparatus1, a structure of its fluid circuit including its peripheral circuitrywill be explained with reference to FIG. 12.

The tridimensional integrated gas panel apparatus 1 has multiple branchflow channels R1 arranged in parallel in a circuit, a single main flowchannel R2 to which an exit of each branch flow channel R1 is connectedand multiple middle flow channels R3 each of which makes each of thebranch flow channels R1 communicate with the main flow channel R2.

An inlet port PI is connected to a proximal end of each branch flowchannel R1 and several kinds of gas are sent to each branch flow channelR1 from the gas supply sources respectively through an outside pipe (notshown in drawings) connected to the inlet port PI. A gas control unitsuch as a valve V or a mass flow controller MFC is arranged in thecourse of each branch flow channel R1 so as to control the gas flowflowing in each branch flow channel R1 or to control a switch to purgegas.

Each of the middle flow channels R3 is connected to a distal end (exit)of each branch flow channel R1 so as to make each of the branch flowchannels R1 communicate with the main flow channel R2.

The main flow channel R2 has, as mentioned above, single flow channelstructure. In this embodiment, a gas mixer MIX to stir and mix thejoined gas is arranged on the downstream side of the tridimensionalintegrated gas panel apparatus 1, namely on the downstream side of themain flow channel R2, and a flow ratio controller FRC to divide the gasmixed by the gas mixer MIX at a predetermined flow ratio and to outputthe divided gas to each chamber from an outlet port PO is arranged onfurther downstream side of the gas mixer MIX. The gas mixer MIX, theflow ratio controller FRC and the outlet ports PO are not drawn in FIG.11.

With this arrangement, the gas supplied from each gas supply source isflow-controlled in the branch flow channel R1 of the tridimensionalintegrated gas panel apparatus 1 and introduced into the main flowchannel R2 through the middle flow channels R3, then fully mixed by thegas mixer MIX, and output at a predetermined flow ratio through the flowratio controller FRC from each of the outlet ports PO respectively.

In FIG. 12, the above-mentioned flow channel for the purge gas, itsinlet port PX, and its outlet port PY are drawn in addition to the mainflow channel R2 and the branch flow channels R1. The component denotedby the reference code MFM is a verifier to verify whether the flow shownby the mass flow controller MFC is accurate or not.

Next, a mechanical structure of the tridimensional integrated gas panelapparatus 1 will be explained with reference to FIG. 11 and FIG. 13.

The tridimensional integrated gas panel apparatus 1 comprises branchflow channel block bodies 3 each of which is in an elongating platepanel shape inside of which one branch flow channel R1 is formed, acenter block body 4 in a regular polygonal column shape (regularoctagonal column shape) where the main flow channel R2 and the middleflow channels R3 are formed, the above-mentioned gas control unit V, MFCthat is mounted on the branch flow channel block body 3 and ancillarypipes such as inlet ports PI. One branch flow channel R1 here representsone of the multiple branch flow channels.

The branch flow channel block body 3 comprises multiple block bodyelements 31 each of which is in a flat square plate shape and each ofwhich is serially arranged. Some of the block body elements 31 havedifferent internal piping structures such as for loading a valve or forloading a mass flow controller. It is a matter of course that the branchflow channel block body may be an integrated body.

The center block body 4 is, as mentioned above, in a regular polygonalcolumn shape as being a rotational symmetrical shape with a center on anaxial line, and each bottom surface 3 a as being a mounting surface ofeach branch flow channel block body 3 is held to face each sideperipheral surface 41 as being a mounting surface of the center blockbody 4.

The main flow channel R2 is arranged at one end portion of the centerblock body 4 along an axial line C. An outlet port P to be connectedwith an outside pipe is mounted on a distal end (an end at theabove-mentioned end portion side) of the main flow channel R2, and theoutlet port P projects from an end surface 4 a of the center block body4. In addition, a junction CN is set at a proximal end (an end locatedat an opposite side to the above-mentioned end portion) of the main flowchannel R2, and each of the middle flow channels R3 extends from thejunction CN both perpendicular to the axial line C and radially towardeach side peripheral surface 41 of the center block body 4. Each of themiddle flow channels R3 has the same length.

In accordance with this arrangement, since a flow channel length (alength of the middle flow channel R3) from each branch flow channel R1to the main flow channel R2 is equal and all of the middle flow channelsR3 join at the junction CN arranged at one position of the main flowchannel R2, a distance from each of the branch flow channels R1 to thefinal outlet port P becomes equal. As a result of this, it is possibleto dramatically improve the synchronism of the arrival time of each gas.

In addition, since the main flow channel R2 located at the end portionof the center block body 4 is near the outlet port P and the length ofthe main flow channel R2 is very short, the responsiveness becomesextremely superior. This can be said to be an effect produced by makinguse of the tridimensional structure characteristics.

Furthermore, since various components that were conventionally arrangedin a plane are arranged three-dimensionally in this embodiment, it ispossible to downsize the apparatus.

It is a matter of course that this embodiment can be modified.

For example, in order to further improve synchronism, a diameter of themiddle flow channel or a diameter of each branch flow channel located onthe downstream side of the mass flow controller may be set to bedifferent in accordance with the flow of each gas (the less the flow is,the smaller the diameter is). In addition, it is possible to set alength of the middle flow channel in accordance with the flow of eachgas (the less the flow is, the shorter the length is.) In this case, forexample, the junction may be displaced from the axial line of the middleblock body with a shape of the middle block body left to be in arotational symmetry shape, or the length of the middle flow channel isvaried by making the middle block body in a deformed shape.

Furthermore, speaking of the center block body, it is not limited to asingle body, and may be arranged by combining multiple block bodyelements. In addition, the shape of the center block body is not limitedto a regular polygonal column and may be any shape as long as apolygonal rotational symmetrical shape having the axial line as thecenter is formed by each holding surface 41. The center block may be ina shape shown in, for example, FIG. 14.

In addition, in consideration of manufacturing convenience or on theground of limitation of the shape, the junction is set not at oneportion but may be set at multiple positions each of which is slightlydeviated on the main flow channel as long as the effect of theresponsiveness is substantially negligible.

In addition, a part or all of the above-mentioned embodiments may beappropriately combined, and the present claimed invention may bevariously modified without departing from a spirit of the invention.

1. An integrated gas panel apparatus comprising multiple branch flowchannels in a course of which a gas control unit such as a valve or amass flow controller is arranged so as to control gas that flows insidethe branch flow channels, a single main flow channel into which the gasfrom each of the branch flow channels flows and joins, and a panel bodyof a manifold type inside of which the branch flow channels and the mainflow channel are formed by assembling multiple block bodies, wherein thepanel body comprises a main flow channel block body that forms the mainflow channel, and branch flow channel block bodies that are arranged toface each other by having the main flow channel block body at the centerand that forms the branch flow channels.
 2. The integrated gas panelapparatus described in claim 1, wherein a first junction where a firstbranch flow channel joins the main flow channel and a second junctionwhere a second branch flow channel that faces the above-mentioned firstbranch flow channel across the main flow channel joins the main flowchannel, are set at generally the same position in an elongatingdirection of the main flow channel.
 3. The integrated gas panelapparatus described in claim 2, wherein an exit pipe of the first branchflow channel is arranged to project inward from an inside surface of themain flow channel by a predetermined length at the above-mentioned firstjunction.
 4. The integrated gas panel apparatus described in claim 1,wherein the gas is used for a semiconductor manufacturing process.
 5. Anintegrated gas panel apparatus comprising multiple branch flow channelsin a course of which a gas control unit such as a valve or a mass flowcontroller is arranged so as to control gas that flows inside the branchflow channels, a main flow channel into which the gas from each of thebranch flow channels flows, and a panel body inside of which the branchflow channels and the main flow channel are formed by assemblingmultiple block bodies, wherein an insertion bore that is incommunication with the main flow channel is formed in a main flowchannel block body inside of which the main flow channel is arranged,and a projecting pipe that projects an associated branch flow channeloutside is arranged on a branch flow channel block body inside of whichan exit portion of the associated branch flow channel is provided, adistal end of the projecting pipe further projects inward from an insidesurface of the main flow channel in a state wherein the main flowchannel block body and the branch flow channel block body are assembledby inserting the projecting pipe into the insertion bore.
 6. Theintegrated gas panel apparatus described in claim 5, wherein the distalend of the projecting pipe is set to reach near a center of the mainflow channel in a cross section.
 7. The integrated gas panel apparatusdescribed in claim 5, wherein the gas is used for a semiconductormanufacturing process.